EUV Source Technology Research team is fully based in San Diego, where the team identifies novel solutions that enable... of high-power extreme ultraviolet (EUV) light sources. The EUV source technology development team is responsible...
and demonstrating the technologies required for next generations of high-power extreme ultraviolet (EUV) light sources. Based on a laser... amplification and high-power optical systems to laser produced plasma for EUV generation, electro-optical signal detection...